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Wafer bonding
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31	SEMI-FINISHED BONDED SUBSTRATES: SILICON ON GLASS (SOG) µm up. The precise specifications of each Contact Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 06:53:22 Electronics manufacturing Wafer bonding Semiconductor device fabrication Wafer Chemical bonding Anodic bonding Direct bonding 100 micrometres Microelectromechanical systems Microtechnology Electronics Technology
32	THERMOCOMPRESSION WAFER BONDING WITH THIN METAL LAYERS Contact Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 06:04:42 Technology Wafer bonding Thermocompression bonding Anodic bonding Direct bonding Chemical bond Reactive bonding Eutectic bonding Microtechnology Electronics Electronics manufacturing
33	SEMI-FINISHED BONDED SUBSTRATES Silicon LiTaO3 100 µm Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 05:44:20 Electronics manufacturing Wafer bonding Microelectromechanical systems Anodic bonding Eutectic bonding Wafer Adhesive bonding Glass frit bonding Direct bonding Microtechnology Technology Electronics
34	F R A U N H O F E R I n s t i t u t e F o R E l e c t roni c N A no s y s t e m s E N A S System Packaging Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 04:48:28 Electronics manufacturing Semiconductor device fabrication Wafer bonding Chemical bonding Microelectromechanical systems Reactive bonding Glass frit bonding Three-dimensional integrated circuit Micro-Opto-Electro-Mechanical Systems Microtechnology Technology Electronics
35	FRAUNHOFER CAM IS A COMPETENCE CENTER FOR MICROSTRUCTURE DIAGNOSTICS A N D M AT E R I A L C H A R A C T E R I Z AT I O N WITHIN FRAUNHOFER IWM IN HALLE FRAUNHOFER CENTER Add to Reading List Source URL: www.iwm.fraunhofer.de Language: English - Date: 2014-05-19 10:55:49 Electromagnetism Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Microsystem Technologies Wafer bonding Shuvo Roy RF MEMS Materials science Microtechnology Technology
36	F R A U N H O F E R I N S T I T U T E F O R M E C H A N I C S O F M AT E R I A L S I W M COMPONENTS IN MICROELECTRONICS AND MICROSYSTEMS TECHNOLOGY Your competent partner for Add to Reading List Source URL: www.en.iwm.fraunhofer.de Language: English - Date: 2011-11-18 03:55:18 Technology Electron microscopy Failure Thin film deposition Microtechnology Microelectromechanical systems Failure analysis Wafer bonding Focused ion beam Science Semiconductor device fabrication Scientific method
37	Kickoff for a new generation of even more intelligent Systems Th e F r a unhof e r I n s ti tu te fo r M i cro e l e c tro n i c C i rc ui ts and Sy s tems wi ns the 1 2 i nv es ts 16 M i l l i on Add to Reading List Source URL: www.ims.fraunhofer.de Language: English - Date: 2014-02-15 05:05:43 Electromagnetism Semiconductor device fabrication Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Etching Wafer bonding Infrared Materials science Technology Microtechnology
38	6- Bonding LetiDay_ChDeguetfinal Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2014-07-18 03:18:39 Technology Wafer bonding Chemical bonding Semiconductor device fabrication Glass frit bonding Direct bonding Anodic bonding Wafer Microtechnology Electronics Electronics manufacturing
39	C o n tact V i s it u s at t h e I n n o T r a n s i n B e r li n : Hall 2 3 b , B o o t h 2 0 6 Add to Reading List Source URL: www.verkehr.fraunhofer.de Language: English - Date: 2014-12-05 21:11:14 Technology Electronics Electronics manufacturing Wafer bonding Adhesive bonding Fraunhofer Society Laboratories Materials science
40	MEMS & Micro Power Generation (MPG) DARPA Tech 2000 William C. Tang, Ph. D. Program Manager[removed] Add to Reading List Source URL: archive.darpa.mil Language: English - Date: 2000-10-06 09:20:49 RF MEMS Microelectromechanical systems Microsystem Wafer bonding Surface micromachining DARPA Microtechnology Materials science Technology